Substrate temperature accuracy and temperature control flexibility in a molecular beam epitaxy system

ABSTRACT

A control system and method for controlling temperatures while performing a MBE deposition process, wherein the control system comprises a MBE growth structure; a heater adapted to provide heat for the MBE deposition process on the MBE growth structure; and a control computer adapted to receive a plurality of dynamic feedback control signals derived from the MBE growth structure; switch among a plurality of control modes corresponding with the plurality of dynamic feedback control signals; and send an output power signal to the heater to control the heating for the MBE deposition process based on a combination of the plurality of control modes. In one embodiment, the plurality of dynamic feedback control signals comprises thermocouple signals and pyrometer signals.

GOVERNMENT INTEREST

The embodiments described herein may be manufactured, used, and/orlicensed by or for the United States Government without the payments ofroyalties thereon.

BACKGROUND

1. Field of the Invention

The embodiments herein generally relate to thermometry, and, moreparticularly, to methods for controlling growth temperatures in amolecular beam epitaxy system.

2. Description of the Related Art

Molecular Beam Epitaxy (MBE) is one of a family of methods used to growsingle-crystal films on single crystal substrates (epitaxy). In an MBEsystem, a substrate, on which the crystalline film is to be grown, andseveral material sources are contained in an ultra-high vacuum chamber.The sources are typically furnaces, each containing a specific elementto be deposited on the substrate. A furnace uses an open crucible inwhich the evaporant is placed. Moreover, resistive heating wires andheat shields generally surround the crucible. Generally, the evaporantis heated to a temperature that produces a material flux of desirablemagnitude from the crucible opening (a molecular beam) and which isaimed towards the substrate crystal, where the molecules are allowed tocondense. The beam is turned on and off by a mechanical shutter blade infront of the crucible opening. High stability of the flux, and thereforegrowth rate, is accomplished by high stability of the furnacetemperatures.

In addition to stable source temperatures, a stable process relies on awell-controlled substrate temperature. The substrate is warmed by aresistively heated element placed behind it. Because the substrateshould be allowed to rotate around its azimuthal axis during depositionto ensure good layer uniformity, there are generally inadequatesolutions to mechanically contact the substrate for measurement of thetemperature. Usually, a thermocouple is placed somewhere behind thesubstrate in the vicinity of the back side and the heater element. Asubstantial difference between the real temperature of the substratefront side and the thermocouple reading is therefore commonly observed.To achieve a stable temperature, a proportional integrating derivative(PID) control unit is typically used, which sets the output level from apower supply to the substrate heater, depending on the thermocouplereading. In many systems, the temperature setpoints are set by a digitalcontrol computer, which also opens and closes the mechanical shutters infront of the evaporation sources for predetermined times, thus producingspecific film thicknesses.

The difference between the thermocouple reading and the true temperatureis generally determined empirically. The most common way of obtainingmore reliable temperature readings is to use an optical pyrometer.Typically, it is first calibrated by observing some type of phasetransformation that is known to take place at a well-definedtemperature. The pyrometer is then adjusted by setting a value for theapparent emissivity of the substrate so that the instrument reads thedesired value.

It is possible to use the pyrometer signal directly as input in the feedback loop. This could be accomplished by hard wiring the pyrometer tothe PID controller, or by feeding it to the control computer and lettingit send appropriate signals to the PID controller. However, in eithercase, the use of the pyrometer is limited to temperature ranges aboveseveral hundred degrees, typically above 400° C. Since the substrate isat room temperature at the start of the process, pyrometers aregenerally not useful during the initial warm up phase. Also, during thedeposition phase some materials may require deposition at temperaturesbelow 400° C. In addition, some films and some holders of smallsubstrates are prone to let stray light from the evaporations sourcesenter the pyrometer, which can produce erroneous readings. In thesecases thermocouple control, or constant power output are the preferredchoices.

Finally, deposition of layers that aim to produce structures withoptical interference properties, such as a Bragg mirror, can be used.During deposition of such films the signal reaching a pyrometer as wellas the temperature observed by the thermocouple exhibit strongoscillations, making both generally unreliable and unsuitable forfeedback control. Accordingly, there remains a need to improve the MBEdeposition sequence via more accurate temperature control.

SUMMARY

In view of the foregoing, an embodiment herein provides acomputer-implemented method of controlling temperatures while performinga MBE deposition process, and a program storage device readable bycomputer, tangibly embodying a program of instructions executable by thecomputer to perform a method of controlling temperatures whileperforming a MBE deposition process, wherein the method comprisesproviding a heating sequence for the MBE deposition process on a MBEgrowth structure; receiving, in a control computer, a plurality ofdynamic feedback control signals derived from the MBE growth structure;switching, in the control computer, among a plurality of control modescorresponding with the plurality of dynamic feedback control signals;and sending an output power signal from the control computer to the MBEgrowth structure to control the heating for the MBE deposition processbased on a combination of the plurality of control modes. Preferably,the plurality of dynamic feedback control signals comprises thermocouplesignals and pyrometer signals. The method may further comprise receivingdata related to material properties of the MBE growth structure;selecting temperature values based on the material properties of the MBEgrowth structure; heating the MBE growth structure based on the selectedtemperature values; growing crystals on the heated MBE growth structure;and cooling the MBE growth structure. Moreover, the method may furthercomprise performing a thermocouple calibration sequence on athermocouple and a pyrometer monitoring the MBE growth structure.Furthermore, the method may further comprise setting PID controlparameters in the control computer to set a level of the output powersignal. Additionally, the method may further comprise establishingoutput power signal levels in the control computer; directly sending theoutput power signal levels from the control computer to a power supplyunit; and controlling temperatures in the MBE deposition process basedon the output power signal levels.

Another embodiment provides a control system for controllingtemperatures while performing a MBE deposition process, wherein thecontrol system comprises a MBE growth structure; a heater adapted toprovide heat for the MBE deposition process on the MBE growth structure;and a control computer adapted to receive a plurality of dynamicfeedback control signals derived from the MBE growth structure; switchamong a plurality of control modes corresponding with the plurality ofdynamic feedback control signals; and send an output power signal to theheater to control the heating for the MBE deposition process based on acombination of the plurality of control modes. In one embodiment, theplurality of dynamic feedback control signals comprises thermocouplesignals and pyrometer signals. Preferably, the control computer isfurther adapted to receive data related to material properties of theMBE growth structure; select temperature values based on the materialproperties of the MBE growth structure; and send power signals to theheater to allow heating of the MBE growth structure based on theselected temperature values, wherein crystals are grown on the heatedMBE growth structure. Moreover, in one embodiment, the control systemmay further comprise a thermocouple and a pyrometer adapted to monitorthe MBE growth structure, wherein the control computer is furtheradapted to perform a thermocouple calibration sequence on thethermocouple and the pyrometer. Preferably, the control computer isfurther adapted to set PID control parameters to set a level of theoutput power signal. Additionally, the control system may furthercomprise a power supply unit, wherein the control computer is furtheradapted to establish output power signal levels; directly send theoutput power signal levels to the power supply unit; and controltemperatures in the MBE deposition process based on the output powersignal levels. Moreover, the MBE growth structure may comprise asubstrate wafer. In another embodiment, the control system furthercomprises a thermocouple and a non-contact temperature monitor adaptedto monitor the MBE growth structure, wherein the control computer isfurther adapted to perform a thermocouple calibration sequence on thethermocouple and the non-contact temperature monitor.

These and other aspects of the embodiments herein will be betterappreciated and understood when considered in conjunction with thefollowing description and the accompanying drawings. It should beunderstood, however, that the following descriptions, while indicatingpreferred embodiments and numerous specific details thereof, are givenby way of illustration and not of limitation. Many changes andmodifications may be made within the scope of the embodiments hereinwithout departing from the spirit thereof, and the embodiments hereininclude all such modifications.

BRIEF DESCRIPTION OF THE DRAWINGS

The embodiments herein will be better understood from the followingdetailed description with reference to the drawings, in which:

FIG. 1 illustrates a schematic diagram of a hardware configurationaccording to an embodiment herein;

FIGS. 2 through 5 are flow diagrams illustrating methods according tothe embodiments herein;

FIG. 6 is a graphical representation illustrating temperature results asa function of time for a film deposition sequence according to anembodiment herein;

FIG. 7 is a flow diagram illustrating a preferred method of anembodiment herein; and

FIG. 8 is a computer system diagram according to an embodiment herein.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

The embodiments herein and the various features and advantageous detailsthereof are explained more fully with reference to the non-limitingembodiments that are illustrated in the accompanying drawings anddetailed in the following description. Descriptions of well-knowncomponents and processing techniques are omitted so as to notunnecessarily obscure the embodiments herein. The examples used hereinare intended merely to facilitate an understanding of ways in which theembodiments herein may be practiced and to further enable those of skillin the art to practice the embodiments herein. Accordingly, the examplesshould not be construed as limiting the scope of the embodiments herein.

As mentioned, there remains a need to improve the MBE depositionsequence via more accurate temperature control. The embodiments hereinachieve this by providing a technique to feed a constant power level tothe substrate heater and to use more than one feedback signal and morethan one control mode during an MBE deposition sequence. Referring nowto the drawings, and more particularly to FIGS. 1 through 8, wheresimilar reference characters denote corresponding features consistentlythroughout the figures, there are shown preferred embodiments.

An exemplary hardware embodiment is shown in FIG. 1. A substrate wafer 1of arbitrary shape is rotated around its azimutal axis duringdeposition. The substrate wafer 1 is held in place by a wafer holder 17.Behind the substrate wafer 1 is a resistive heater 2 and a thermocouple3, none of which are in intimate contact with the substrate wafer 1 orits holder 17. The heating is accomplished by an electric power supply4, which receives information about the desired output power level froma hardware controller 5, for example a PID controller, such as thatavailable from Eurotherm, Va., USA is preferably used. Such a hardwarecontroller 5 is used in conjunction with a control computer 6 that cansend set points and PID values to the hardware controller 5.Accordingly, the controller 5 is connected to the computer 6.Additionally, a control cable 16 may be connected from the computer 6directly to the power supply 4. An optical pyrometer 7 is positioned sothat it can capture radiation from the substrate wafer 1. A pyrometer 7is just one example of an optical, or even more generic, a non-contacttemperature monitor that is assumed to able to read the “true”temperature of the substrate wafer 1. The embodiments herein include afeature for self-calibration of the pyrometer (or any other optical orotherwise non-contact temperature monitor) 7 versus the thermocouple 3or constant power output as further described below.

The signal flow 8 from the computer 6 to the controller 5 may compriseany of the following: PID parameters such as proportional, derivativeand integration constants, temperature setpoints (T_(TC-setp)), andoutput power values. The signal flow 9 to the computer 6 from thecontroller 5 may comprise actual thermocouple temperatures(T_(TC-actual)). The computer 6 also inputs values taken from atemperature signal 10 from the pyrometer 7. The analog input 11 to thecontroller 5 from the system includes voltage from the thermocouple 3.The output signal 12 from the controller 5 to the power supply 4 is apercentage value of the total available power. The output signal 13 fromthe power supply 4 comprises voltage and current. Finally, the pyrometer7 converts heat 14 radiated from the substrate wafer 1 to thetemperature signal 10. If the substrate wafer 1 is configured verysmall, heat from areas 15 surrounding the actual wafer 1 or heat/lightfrom other objects reflected from areas 15 may also enter the pyrometer7, which may cause erroneous readings, which is further described below.

The embodiments herein use a feature of the hardware controller 5 thatallows bypass of the hardware PIED control and allows the hardwarecontroller 5 to output a constant power level that can be set by thecontrol computer 6. Preferably, a PID control routine is implemented insoftware on the control computer 6, which can read both the signal 9from the hardware controller 5 as well as the temperature signal 10 fromthe pyrometer 7. It is possible, during a complex deposition sequence,to switch dynamically between three different control modes: 1)thermocouple feedback; 2) pyrometer feedback; and 3) constant power. Inaddition, PID control parameters can be assigned dynamically duringdeposition to optimize the temperature response of the substrate wafer1.

When the control cable 16 is added between the computer 6 and the powersupply 4, output power levels can be sent directly to the power supply 4via the control cable 16, thereby bypassing the controller 5. Thefunctionality of the controller 5 and the computer 6 differ from theconventional systems. Generally, more of the decision-making and controlwork is moved from the low-level hardware controller 5 to the computer6. This enables dynamic switching between the different control modes(described above) during a process sequence.

Generally, in the conventional systems, the function of a controlcomputer is limited to reading the signal from the pyrometer, andsending PID parameters and thermocouple set points to the controller. Alow-level controller accepts the PID parameters and thermocouple setpoints, inputs the thermocouple voltage and translates it into atemperature value, T_(TC-actual), calculates the output percentage andsends the value to the power supply.

Conversely, according to the embodiments herein, the action ofcalculating the output percentage is moved up in the control hierarchyto the control computer 6. The actual thermocouple temperature is notonly read in to the computer 6 from the controller 5 for displaypurposes, but may be used in the output power calculation routine. Asecond option is to use the signal 10 from the pyrometer 7 in thiscalculation. A third option is to bypass the calculation and set a fixedoutput percentage via the controller 5 or directly to the power supply 4via the direct connection afforded by the control cable 16. In theconfiguration provided by the embodiments herein, the power level to beoutput by the power supply 4 is set via the controller 5 in the form ofa percent level command. In the direct control configuration (i.e.,using the control cable 16) the output power level can be set by directcommand from the control computer 6.

No hard rewiring is needed for the embodiments herein to function.Moreover, the direct connection (i.e., using the control cable 16)between the computer 6 and the power supply 4, and comprising theaddition of one serial communication control cable 16, does notinterfere with the operation of the system 50. With the hardwarecontroller 5, only a reprogramming of the communications protocol andpressing a front panel switch (not shown) (from auto to manual) arerequired. It is possible that these actions can be performed by thecontrol computer 6. The same configuration can also be used for controlof an evaporation cell (not shown). If so, the pyrometer 7 is eliminatedand the substrate wafer 1 is replaced by a crucible (not shown)containing the evaporant.

The core of the software program, which is run on computer 6 (of FIG. 1)is a continuously running routine that performs the PID control asdepicted in FIG. 2. Specifically, FIG. 2 shows a constantly runningloop, the purpose of which is to set the correct output power usingeither of the three control modes. First, a check is performed to see ifconstant power is used (100). If this is the case, a jump occursdirectly to the point where the output power is set (110). If constantpower is not to be used, the global control parameters are read in toenable update in case they have been changed by higher-level processes(101). Next, a check for thermocouple or pyrometer mode is performed(102). If pyrometer control is the chosen mode, the current pyrometersignal is read (104), then the pyrometer control temperature is setequal to the target temperature (106). If thermocouple control is to beused, the current thermocouple reading is obtained (103). Subsequently,the thermocouple temperature is translated to a real temperature, whichis defined as one given by the pyrometer (or any other opticalmeasurement technique) 7 (of FIG. 1) via the experimentally determinedrelationship between the two (in this case a linear one) (105). Once thenew target and current real temperatures have been determined, they areused in a PID calculation to determine the needed output power at thatinstance in time (108). Next, the calculated output power level is sentto the low level controller (110) or, in the case when the controlcomputer is direct connected to the power supply, a corresponding numberis sent to low level controller (115). Finally, the process is haltedfor a short system-dependent time interval (112) to allow the controlevent to act before the cycle starts over.

A low system priority is provided so as not to interfere with moretime-critical processes, such as opening and closing shutters (notshown). The software routine continuously monitors a set of globalvariables which are a) the desired temperature setpoint, (T_(setpoint));b) the control mode (equals control by pyrometer 7 (of FIG. 1), controlby thermocouple 3 (of FIG. 1) or constant power output); and c) the PIDvalues. Higher level programs control the temperature by setting newvalues for the global variables. Instantaneous changes in temperatureare accomplished by setting a new value for the temperature setpoint.Gradual changes in temperature are accomplished by invoking routinesthat execute a set of step-wise temperature changes with specific timedelays. More complex process sequences are built up from combinations ofsuch functions.

Another feature of the preferred embodiments is the ability to switchdynamically between the three different control modes: control bythermocouple 3, control by pyrometer 7, and constant output power 13.With respect to FIG. 1, in the following examples, it is assumed thatthe signal 10 from the pyrometer 7 represents the true temperature. Itis, however, possible to substitute the signal 10 from the pyrometer 7with a signal from any other type of instrument that can providereliable information about the temperature of the sample.

Next, with respect to the deposition process for a small-size,semiconductor sample with a small bandgap, the following describes theoutgassing and film growth on a sample of such a small size that straylight may make the signal 10 from the pyrometer 7 unreliable at lowertemperatures. Furthermore, a material is chosen, in this case GaSb,which requires a relatively low deposition temperature, which is belowthe operating temperature of the pyrometer 7. Although GaSb is chosen asan example, the method can be applied to any other material with similarcharacteristics.

A flowchart of the preparation and calibration process is shown in FIG.3 (with reference to FIG. 1). The first step in the process is adecision point (125) at which it is determined if the stray light to thepyrometer 7 (of FIG. 1) should be minimized. If this is the case, thesample rotation is first set to a slow value such that a significantnumber of pyrometer readings can be obtained with a suitable azimuthalangular resolution (127). Next, pyrometer signals are sampled for longenough time interval to cover a 360 degree rotation of the sample. Theminimum pyrometer value in this data set is determined (129) and therotation continues until the same value is again read by the pyrometer 7(of FIG. 1), at which point the rotation is stopped (131). The positionof the wafer 1 (of FIG. 1) is now suitable and information about thesubstrate material is sought (133). This could be in the form of aninteractive question to the operator or provided via higher levelcontrol processes that call this routine. Based on the choice ofmaterial, a suitable set of temperatures and control parameters arecalled up from a memory component of computer 6 (135). Since the processstarts at room temperature, at which the pyrometer 7 (of FIG. 1) doesnot work, the initial control is set to thermocouple mode (137).

The substrate wafer 1 is then ramped up to a target temperature, T₁(139), which is higher than T₂ and T₃, which are further explainedbelow. A loop is then started, in which the temperature signal 10 (ofFIG. 1) is monitored to determine if it is providing reliableinformation (141). The criteria for this is that the thermocoupletemperature should be higher than some value T₂, below which there is noreason to even check for signal 10 (of FIG. 1) because the substratewafer 1 is transparent. The next criterion is that the pyrometer readingshould be higher than T₃, which is its minimum reliable temperature(specific to the instrument). Finally, the time derivative dT_(pyro)/dtmust be positive, or in other words the temperature must be increasing.Typically, the pyrometer temperature reading as a function of time showsinitially a decreasing behavior, when the substrate wafer 1 (of FIG. 1)is transparent. The pyrometer temperature reading then reaches a minimumat T₃ when the substrate wafer 1 (of FIG. 1) starts to become opaque andthen exhibits an increase as the reading starts being dominated by theradiation from the surface of the substrate wafer 1 (of FIG. 1), whichis then the real temperature). When these criteria are met, the system50 (of FIG. 1) switches to pyrometer control (143). The wafer 1 (ofFIG. 1) is then ramped up (145) to a material-specific value, T₄, abovethe temperature at which the oxide desorbs and which is suitable forthermal cleaning. This thermal cleaning is then allowed to continue fora suitable, material-specific time (147). After this, a decision point(149) determines if a calibration should be performed to determine therelationship between the pyrometer readings and the thermocouple orconstant power values, or no calibration is needed at all. If nocalibration is needed a simple down-ramp to the growth temperature underpyrometer control is started (153). If a thermocouple calibration isselected this process is started (151), similarly if a constant powercalibration is selected this is started (152). Both of these processesare further described in FIG. 4. Finally, the crystal growth is started(155).

The preparation of a GaSb wafer 1 includes a heating sequence that takesthe temperature up from room temperature, to a value above which thenative oxide desorbs, which for GaSb is approximately 600° C. Theinitial temperature ramp targets a value, T₁, which is chosen to behigher than the values T₂ and T₃, as further described below. At roomtemperature the pyrometer 7 cannot be used since the wafer 1 does notappear opaque to the instrument, nor does it emit enough light toproduce a signal detectable by typical available instruments.Thermocouple feedback is therefore used. The control computer 6 monitorsthe signals from both the thermocouple 3 and the pyrometer 7 andswitches the input signal 11 when a set of criteria are met. Thesecriteria include: thermocouple signal 11 greater than T₂, (anempirically determined value that depends on the heating efficiency ofthe particular system heater configuration and the wafer materialproperties), signal 10 greater than T₃ (the minimum reliable outputtemperature of the pyrometer), and the time derivative of the signal 10greater than zero (i.e. the temperature is verified to be increasing).

Before the thermocouple-based upramp is started, the apparent signalfrom the pyrometer 7 can be monitored as a function of azimuthalorientation of the substrate holder 17. With the substrate wafer 1 andholder 17 at room temperature, any elevated temperature signal 10 fromthe pyrometer 7 is due to spurious stray light from other hot objects inthe growth chamber (not shown). Because the substrate holder 17 normalis not necessarily perfectly aligned with the axis of the pyrometer 7,and various hot cells such as dimer-crackers for Group V cells areoff-axis relative to the pyrometer 7, there are azimuthal angels atwhich the reflected stray light is minimized (or maximized). The heatingsequence can therefore be started with a short time sequence, duringwhich the azimuthal rotation speed is set to a low value, and the lengthof the sequence is chosen so that at least one full turn is completed.During this time the signal 10 is recorded. The minimum signal value isfound by the computer 6 and the azimuthal rotation is continued. Thecontrol computer 6 then continues to monitor the signal 10 but stops therotation when the signal 10 again reaches the minimum value. Thissequence assures that the error in the signal 10 is minimized. Forlarger wafers, uniform heating, which is accomplished by continuousrotation, is more important, but since the stray light from the holder17 is then much lower, the optimization feature can be bypassed.

After the oxide has desorbed, the temperature is further raised a fewten degrees to T₄, to clean the substrate by thermal outgassing. Itremains at this level for a few minutes after which the temperature islowered to a value suitable for deposition and crystal growth,T_(growth). The temperatures, T₄ and T_(growth), are chosen empiricallyfor each type of substrate wafer 1 and the desired outcome of theprocess, using separate optimizations. According to the embodiments, thedown ramp can be broken into stages that generate a relationship betweenthe signal 10 and the reading of the thermocouple 3 or the amount ofpower sent to the heater 2. This calibration relationship can then beused for control during the subsequent film growth if the signal 10 isdeemed to be unreliable, either because of stray light, or because thegrowth temperature might be below the operating range of the pyrometer 7(as shown in the last stages in FIG. 3). The calibration sequence canalso be repeated an arbitrary number of times and at arbitraryinterruption points during the film growth, if it can be expected thatthe relationship has changed by the presence of the deposited film. Anexample of this would be InGaAs deposition on InP, which increases theabsorption of the wafer/epi film combination such that less heat isrequired to maintain a certain surface temperature, which is registeredby the thermocouple 3 (of FIG. 1) as a lower reading.

The down-ramp is broken into steps—a minimum of two—and preferably four.For each step the temperature is lowered under pyrometer control until apredetermined value is reached. It is then held at this level while thethermocouple temperature, or power level, is monitored. When the timederivative of the thermocouple signal is zero, the system 50 (of FIG. 1)is assumed to be in equilibrium and the values from the two temperaturemonitors are recorded. If instead the power output is recorded, a timeaveraging is done as shown in FIG. 4.

In FIG. 4, the calibration of the thermocouple 3 (of FIG. 1) begins witha step counter update (175). The counter counts the number of steps thatwill be used in the calibration. The temperature of the substrate wafer1 (of FIG. 1) is then ramped down to a preset value T_(pyro,j) (177).The temperature of the thermocouple 3 (of FIG. 1) is then monitored(179). The temperature reading exhibits an initial fast drop, and aftera short period of time, slowly comes to a steady state when the wafer 1(of FIG. 1) and heater 2 (of FIG. 1) reach equilibrium. When the changein the thermocouple reading as a function of time reaches a preset smallvalue, the system 50 (of FIG. 1) is considered to be in equilibrium andthe pair of thermocouple and pyrometer values are recorded (181). Thisprocess is repeated n times (183). Once the entire set of temperaturepairs has been determined, a least square fit is obtained (185). In thegeneral case, any functional relationship could be determined. Theparameters that describe the functional relationship, in the case of astraight line, the slope, k, and the intercept, m, are stored as globalvariables (187). The control mode is then switched to thermocouple (189)and a ramp started to the growth temperature (191).

The procedure for constant power versus pyrometer calibration proceedsin a substantially similar manner as also illustrated in FIG. 4. Thecalibration starts with a step counter update (176). The counter countsthe number of steps that will be used in the calibration. Thetemperature of the substrate wafer 1 (of FIG. 1) is then ramped down toa preset value T_(pyro,j) (178). The output power is then averaged toobtain a reliable number (180). The pair of thermocouple and powervalues are then recorded (182). This process is repeated n times (184).Once the entire set of temperature pairs has been determined, a leastsquare fit is obtained (186). In the general case, any functionalrelationship could be determined. The parameters that describe thefunctional relationship, in the case of a straight line, the slope, k,and the intercept, m, are stored as global variables (188). Thepyrometer control mode is then maintained and a ramp started to thegrowth temperature (190). Finally, the control mode is changed toconstant power mode (192).

When the whole set of steps have been completed, a functionalrelationship is determined. This could be any function that can bedetermined from the given number of observations. Again, with respect toFIG. 1, the simplest relationship, which works very well for pyrometerand thermocouple calibration, is a linear one, in which case a leastsquares fit is performed on the data set of the signal 10 and the valuesof the thermocouple 3.

T _(pyro) =k*T _(TC) +m

In the case of constant output power as a function of signal 10, alinear relationship also works surprisingly well. However, it is notobvious that this would be the case in an arbitrary system, in whichcase a more complex relationship may have to be found. The values of theslope, k, and the intercept, m, are stored in global variables in thecontrol system, accessible by any other routine. Similarly, more fittingparameters would be stored and accessed in the case when more complexfunctions are used. As mentioned, the pyrometer signal 10 is assumed torepresent the true temperature. However, since the depositiontemperature of the GaSb wafer 1, in this case, will be lower than theminimum reliable temperature of the pyrometer 7 and some of thedeposition sequence will be done using sources that produce excessiveamounts of stray light, this process may use thermocouple feedback, orconstant power. The flowchart for the high-level process is shown inFIG. 5.

The growth of the wafer 1 (of FIG. 1) begins with the growth of GaSb ata temperature of 490° C. (201). Next, the temperature is ramped down to400° C (203). The details of this process are described below. Beforegrowth is started at the lower temperature, new PID values may be set tooptimize the stability of the temperature control at this level (205).Next, a multilayer structure is grown (for example, the multilayerstructure may include alternating layers of InAs and GaSb) (207). Oncethe multilayer sequence is completed, the PID values may be changed backto numbers more appropriate for control of the temperature at higherlevels (209). Then, the temperature is ramped up, in this case to avalue of 500° C. suitable for annealing of the wafer 1 (211). Finally,the growth process is terminated and the substrate wafer 1 (of FIG. 1)is cooled down (213). The ramping events (203) and (211) comprise asequence of events aimed at invoking the correct control modes. Aninitial check is performed of which one of the three modes(thermocouple, pyrometer, or constant power) is to be used (215). Ifconstant power is chosen, the power level corresponding to the endtarget temperature of the ramp is calculated and set. This includes await time to ensure stability (220). If pyrometer control is used, thetarget temperatures are set equal to pyrometer values (217). Ifthermocouple control is used, the target temperatures are translated tothermocouple values (216), in this case using the linear relationshipdetermined during the calibration sequence describe in FIG. 4. Finally,the temperature set points are changed stepwise to accomplish the ramp(218).

The two temperature changes include a check of control mode, acalculation of the control setpoint, and a ramp, changing thetemperature to the new setpoint. In FIG. 5, two changes of PID setpoints are also included that may be introduced to optimize stability oragility at specific stages of the process. An example of the realtemperatures during a deposition sequence is shown in FIG. 6. Thisdemonstrates the result of first running the process described in FIG. 3and FIG. 4 and immediately afterwards running the process in FIG. 5.

The upper curve in FIG. 6 shows the recorded pyrometer temperature as afunction of time and the lower one the thermocouple values. From 0seconds to approximately 1,200 seconds the pyrometer signal representstransmitted light from the heater 2 (of FIG. 1) through the substratewafer 1 (of FIG. 1) and is consequently not used for control. Atapproximately 1,800 seconds the control is handed over to the pyrometer7 (of FIG. 1) and the ramp to 600° C. is continued. At approximately3,000 seconds the stepwise down ramp under pyrometer control is startedand thermocouple readings are recorded. This represents the calibrationof pyrometer versus thermocouple process. At approximately 4,500 secondsthe control mode is changed to thermocouple control. Shortly afterwardsthe growth is started by Ga and Be shutters being opened. These revealstray light from the ovens that is visible as an increase in thepyrometer signal and may produce incorrect temperature control if thiswere used for feedback. At approximately 7,000 seconds the growth isinterrupted and a down ramp process begins. Between 8,000 and 12,500seconds a multilayer is deposited at the lower substrate temperature.Alternating levels of stray light is again visible in the pyrometersignal 10 (of FIG. 1) while the thermocouple level remains flat. Atapproximately 13,500 seconds the temperature is ramped up and held at ahigher annealing temperature (500° C.) until shortly before 15,000seconds, when the process is terminated by shutting off the power of theheater 2 (of FIG. 1), resulting in a rapid temperature drop.

FIG. 7, with reference to FIGS. 1 through 6, illustrates a flow diagramof a computer-implemented method of controlling temperatures whileperforming a MBE deposition process, wherein the method comprisesproviding (301) a heating sequence for the MBE deposition process on aMBE growth wafer 1; receiving (303), in a control computer 6, aplurality of dynamic feedback control signals 10 derived from the MBEgrowth wafer 1; switching (305), in the control computer 6, among aplurality of control modes corresponding with the plurality of dynamicfeedback control signals 10; and sending (307) an output power signal 8from the control computer 6 to the MBE growth wafer 1 to control theheating for the MBE deposition process based on a combination of theplurality of control modes.

The embodiments herein can include both hardware and software elements.In the software embodiment includes but is not limited to firmware,resident software, microcode, etc. Furthermore, the embodiments hereincan take the form of a computer program product accessible from acomputer-usable or computer-readable medium providing program code foruse by or in connection with a computer or any instruction executionsystem. For the purposes of this description, a computer-usable orcomputer readable medium can be any apparatus that can comprise, store,communicate, propagate, or transport the program for use by or inconnection with the instruction execution system, apparatus, or device.

The medium can be an electronic, magnetic, optical, electromagnetic,infrared, or semiconductor system (or apparatus or device) or apropagation medium. Examples of a computer-readable medium include asemiconductor or solid state memory, magnetic tape, a removable computerdiskette, a random access memory (RAM), a read-only memory (ROM), arigid magnetic disk and an optical disk. Current examples of opticaldisks include compact disk-read only memory (CD-ROM), compactdisk-read/write (CD-R/W) and DVD.

A data processing system suitable for storing and/or executing programcode will include at least one processor coupled directly or indirectlyto memory elements through a system bus. The memory elements can includelocal memory employed during actual execution of the program code, bulkstorage, and cache memories which provide temporary storage of at leastsome program code in order to reduce the number of times code must beretrieved from bulk storage during execution.

Input/output (I/O) devices (including but not limited to keyboards,displays, pointing devices, etc.) can be coupled to the system eitherdirectly or through intervening I/O controllers. Network adapters mayalso be coupled to the system to enable the data processing system tobecome coupled to other data processing systems or remote printers orstorage devices through intervening private or public networks. Modems,cable modem and Ethernet cards are just a few of the currently availabletypes of network adapters.

A representative hardware environment for practicing the embodiments ofthe invention is depicted in FIG. 8. This schematic drawing illustratesa hardware configuration of an information handling/computer system inaccordance with the embodiments of the invention. The system comprisesat least one processor or central processing unit (CPU) 20. The CPUs 20are interconnected via system bus 22 to various devices such as a RAM24, read-only memory (ROM) 26, and an input/output (I/O) adapter 28. TheI/O adapter 28 can connect to peripheral devices, such as disk units 21and tape drives 23, or other program storage devices that are readableby the system. The system can read the inventive instructions on theprogram storage devices and follow these instructions to execute themethodology of the embodiments of the invention. The system furtherincludes a user interface adapter 29 that connects a keyboard 25, mouse27, speaker 34, microphone 32, and/or other user interface devices suchas a touch screen device (not shown) to the bus 22 to gather user input.Additionally, a communication adapter 30 connects the bus 22 to a dataprocessing network 35, and a display adapter 31 connects the bus 22 to adisplay device 33 which may be embodied as an output device such as amonitor, printer, or transmitter, for example.

The embodiments herein provide more precise control of the temperaturesused in an MBE process. The substrate temperature, which may be criticalfor the quality of the grown crystal, can be set in an optimum way, evenwhen artifacts are present in the signals from various temperaturereading sources. An optimum feedback mode can be set dynamically duringthe deposition process so as to minimize artifacts. An opticaltemperature monitor, such as a pyrometer 7, is used as an indicator oftrue temperature (by definition) and its values are related tocorresponding readings of a thermocouple 3 or the power level. Theembodiments herein can be used to control an MBE evaporation source byperforming the PID control in software rather than by a low levelcontroller 5 or by setting constant power levels, when thermocouplefeedback is not possible (e.g., during mechanical failures).

The foregoing description of the specific embodiments will so fullyreveal the general nature of the embodiments herein that others can, byapplying current knowledge, readily modify and/or adapt for variousapplications such specific embodiments without departing from thegeneric concept, and, therefore, such adaptations and modificationsshould and are intended to be comprehended within the meaning and rangeof equivalents of the disclosed embodiments. It is to be understood thatthe phraseology or terminology employed herein is for the purpose ofdescription and not of limitation. Therefore, while the embodimentsherein have been described in terms of preferred embodiments, thoseskilled in the art will recognize that the embodiments herein can bepracticed with modification within the spirit and scope of the appendedclaims.

1. A computer-implemented method of controlling temperatures whileperforming a molecular beam epitaxy (MBE) deposition process, saidmethod comprising: providing a heating sequence for said MBE depositionprocess on a MBE growth structure; receiving, in a control computer, aplurality of dynamic feedback control signals derived from said MBEgrowth structure; switching, in said control computer, among a pluralityof control modes corresponding with said plurality of dynamic feedbackcontrol signals; and sending an output power signal from said controlcomputer to said MBE growth structure to control said heating for saidMBE deposition process based on a combination of said plurality ofcontrol modes.
 2. The method of claim 1, wherein said plurality ofdynamic feedback control signals comprises thermocouple signals andpyrometer signals.
 3. The method of claim 2, further comprising:receiving data related to material properties of said MBE growthstructure; selecting temperature values based on said materialproperties of said MBE growth structure; heating said MBE growthstructure based on the selected temperature values; growing crystals onthe heated MBE growth structure; and cooling said MBE growth structure.4. The method of claim 2, further comprising performing a thermocouplecalibration sequence on a thermocouple and a pyrometer monitoring saidMBE growth structure.
 5. The method of claim 2, further comprisingsetting proportional integrating derivative (PID) control parameters insaid control computer to set a level of said output power signal.
 6. Themethod of claim 1, further comprising: establishing output power signallevels in said control computer; directly sending said output powersignal levels from said control computer to a power supply unit; andcontrolling temperatures in said MBE deposition process based on saidoutput power signal levels.
 7. A program storage device readable bycomputer, tangibly embodying a program of instructions executable bysaid computer to perform a method of controlling temperatures whileperforming a molecular beam epitaxy (MBE) deposition process, saidmethod comprising: providing a heating sequence for said MBE depositionprocess on a MBE growth structure; receiving, in a control computer, aplurality of dynamic feedback control signals derived from said MBEgrowth structure; switching, in said control computer, among a pluralityof control modes corresponding with said plurality of dynamic feedbackcontrol signals; and sending an output power signal from said controlcomputer to said MBE growth structure to control said heating for saidMBE deposition process based on a combination of said plurality ofcontrol modes.
 8. The program storage device of claim 7, wherein saidplurality of dynamic feedback control signals comprises thermocouplesignals and pyrometer signals.
 9. The program storage device of claim 8,wherein said method further comprises: receiving data related tomaterial properties of said MBE growth structure; selecting temperaturevalues based on said material properties of said MBE growth structure;heating said MBE growth structure based on the selected temperaturevalues; growing crystals on the heated MBE growth structure; and coolingsaid MBE growth structure.
 10. The program storage device of claim 8,wherein said method further comprises performing a thermocouplecalibration sequence on a thermocouple and a pyrometer monitoring saidMBE growth structure.
 11. The program storage device of claim 8, whereinsaid method further comprises setting proportional integratingderivative (PID) control parameters in said control computer to set alevel of said output power signal.
 12. The program storage device ofclaim 7, wherein said method further comprises: establishing outputpower signal levels in said control computer; directly sending saidoutput power signal levels from said control computer to a power supplyunit; and controlling temperatures in said MBE deposition process basedon said output power signal levels.
 13. A control system for controllingtemperatures while performing a molecular beam epitaxy (MBE) depositionprocess, said control system comprising: a MBE growth structure; aheater adapted to provide heat for said MBE deposition process on saidMBE growth structure; and a control computer adapted to: receive aplurality of dynamic feedback control signals derived from said MBEgrowth structure; switch among a plurality of control modescorresponding with said plurality of dynamic feedback control signals;and send an output power signal to said heater to control said heatingfor said MBE deposition process based on a combination of said pluralityof control modes.
 14. The control system of claim 13, wherein saidplurality of dynamic feedback control signals comprises thermocouplesignals and pyrometer signals.
 15. The control system of claim 13,wherein said control computer is further adapted to: receive datarelated to material properties of said MBE growth structure; selecttemperature values based on said material properties of said MBE growthstructure; and send power signals to said heater to allow heating ofsaid MBE growth structure based on the selected temperature values,wherein crystals are grown on the heated MBE growth structure.
 16. Thecontrol system of claim 15, further comprising a thermocouple and apyrometer adapted to monitor said MBE growth structure, wherein saidcontrol computer is further adapted to perform a thermocouplecalibration sequence on said thermocouple and said pyrometer.
 17. Thecontrol system of claim 15, wherein said control computer is furtheradapted to set proportional integrating derivative (PID) controlparameters to set a level of said output power signal.
 18. The controlsystem of claim 14, further comprising a power supply unit, wherein saidcontrol computer is further adapted to: establish output power signallevels; directly send said output power signal levels to said powersupply unit; and control temperatures in said MBE deposition processbased on said output power signal levels.
 19. The control system ofclaim 14, wherein said MBE growth structure comprises a substrate wafer.20. The control system of claim 15, further comprising a thermocoupleand a non-contact temperature monitor adapted to monitor said MBE growthstructure, wherein said control computer is further adapted to perform athermocouple calibration sequence on said thermocouple and saidnon-contact temperature monitor.